Brand: Applied Materials (AMAT)

Part Number: 0040-8818 Basic Information

Product Name: Gas Manifold / Gas Distribution Block (Gas Diversion Seat / Integrated Gas Distribution Module)

Type: Core component of semiconductor equipment gas path, integrated gas distribution unit

Compatible Models

Mainly compatible with AMAT Centura, Endura, and Producer SE series etching, PVD, and CVD wafer processing equipment, installed in the machine's gas tank and the inlet end of the chamber.

Specifications & Features

Material: 316L stainless steel, internal EP electrolytic polishing, ultra-high cleanliness level, no particle or medium leakage

Structure: Multi-path integrated diversion design, integrating intake, pressure stabilization, and branch pipelines, compact layout

Operating Conditions: Compatible with high-purity process gases, inert gases, able to withstand vacuum, normal process pressure and temperature ranges, extremely high air tightness requirements

Function: Uniformly distributes various process gases, stabilizes gas flow ratio, ensures consistency of process parameters

Maintenance & Usage Tips

Regular leak detection, minor leaks will directly cause process abnormalities and yield decline

Assembly and disassembly require the use of special tools, tightening with standard torque to avoid interface deformation and seal failure

Long-term use is prone to internal pipeline accumulation of dirt, in severe cases, overall replacement is recommended, and it is not recommended to disassemble and polish privately

Compatibility: One-to-one replacement with the same material number from the original manufacturer, no common simple substitutes available