Brand: Applied Materials (AMAT)

Part Number: 0040-53558 Basic Information

Product Name: Tube Assembly / Gas Tubing (Process Gas Pipeline Assembly)

Type: Semiconductor equipment high-purity gas pipeline finished pipeline component, pre-installed connectors, no on-site processing required

Compatible Models

Mainly compatible with Centura and Endura series etching, PVD, and CVD equipment, used for process gas, carrier gas, and purging gas pipelines in the machine.

Specifications & Characteristics

Material: 316L stainless steel, EP electrolytic polishing inner wall, high cleanliness, low particle emission

Structure: Both ends integrated with standard sealing connectors, entire pipeline pre-assembled, gas tightness factory inspection completed

Operating Conditions: Compatible with vacuum environment, high-purity process gas, resistant to pressure, resistant to normal process temperature differences

Function: Conveying process gases, ensuring stable gas flow and no leakage, avoiding process abnormalities

Maintenance & Usage Tips

Installation prohibits bending or squeezing the pipeline to prevent pipe wall deformation and air leakage

Regular leak detection, ｒｅｐｌａｃｅ immediately if there is external wall corrosion, minor leakage, or bending deformation

Same material number can be directly replaced, do not recommend cutting the pipeline for modification and mixed use of other pipelines

Installation follows the original factory torque standard, avoiding damage to the sealing surface of the connector