Brand: Applied Materials (AMAT)

Material Number: 0040-02848 Basic Information

Product Name: Gas Line Fitting / Tube Connector (Gas Line Connector / Tube Connector)

Category: Semiconductor Equipment Vacuum / Process Gas Line Standard Accessories, belonging to Precision Fluid Connectors

Applicable Models

Mainly compatible with AMAT Centura, Endura, Producer series etching, PVD, CVD film deposition equipment, mostly used in process chambers, gas cabinets, and vacuum pipeline systems.

Specifications and Characteristics

Structure: Double socket-type sealing connector, ultra-high cleanliness design, suitable for semiconductor high-purity gas pipelines

Material: 316L stainless steel, internal and external electrolytic polishing (EP), low leaching, corrosion-resistant

Operating Conditions: Suitable for high-purity process gases, vacuum environment, able to withstand high and low temperatures and regular process pressures

Usage: Pipeline connection, diversion, connection, ensuring gas pipeline airtightness, preventing gas leakage and process deviation

Installation & Maintenance Tips

Installation requires controlling torque, strictly prohibit violent twisting, to avoid damage to the sealing surface and resulting in excessive leakage rate

Applicable to high-purity gas, carrier gas, reaction gas pipelines, not suitable for non-standard special medium working conditions

Failure Manifestations: Micro-leakage, socket loosening, surface rusting, if problems occur, immediately stop the machine and ｒｅｐｌａｃｅ

Compatibility: The same material number can be directly interchanged, it is not recommended to use non-standard substitutes interchangeably