AMAT 0021-84842 Product Information

Brand: AMAT (Applied Materials)

Part Number: 0021-84842

General Description

This item is a specialized accessory for semiconductor equipment, widely used in AMAT etching and film deposition wafer processing equipment. It belongs to the standard wear-prone / structural components of the machine. Original factory brand new and disassembled refurbished items are commonly seen in the second-hand semiconductor component circulation market.

Core Parameters & Usage

Category: Fixture/Clamp Assembly

Application Station: Wafer holding, internal cavity positioning and fixation, used for wafer / carrier limit positioning in the vacuum chamber

Compatible Models

Centura Series Etching Machines

Endura Series PVD/CVD Deposition Equipment

Material: Specialized aluminum alloy + surface anodization treatment, suitable for high vacuum and plasma conditions, resistant to temperature changes and anti-pollution of wafer

Working Conditions & Maintenance Points

Working Environment: High vacuum, plasma atmosphere, regular cleaning of surface fluorides and polymer residues

Replacement Cycle: Based on the machine's operating rate, routine inspection and replacement every 3 to 6 months. Immediate replacement if deformation, oxidation, or jamming occurs

Compatibility: Only direct replacement with the same part number is allowed. Do not mix with other similar part numbers to avoid positioning deviation causing wafer fragmentation or process abnormalities