AMAT 0010-34855 Component Details Basic Information

Brand: Applied Materials (AMAT)

Model: 0010-34855

Full name: Heater Assembly

Suitable for wafers: 300mm (12 inches)

Suitable for platforms: AMAT Producer GT / Producer XP series, commonly used in PVD, metal barrier layer, and hard mask deposition process chambers

Core specification parameters

Temperature range: Room temperature to 480°C, regular process uses 120–400°C

Temperature control accuracy: ±0.7°C, surface temperature uniformity ≤ ±1.5°C

Rated power: Approximately 4.0kW, zone heating design

Structural material: High-purity alumina ceramic working surface, built-in heating wire + high-precision thermocouple, main alloy structure, integrated water cooling circuit and vacuum sealing flange

Operating environment: High vacuum, plasma environment, resistant to process gas corrosion

Overall weight: Approximately 28.8kg

Core functions

Carry 300mm wafers and provide uniform heating; rely on thermocouples to achieve temperature closed-loop control, stabilize film deposition rate and film layer consistency; built-in water cooling structure can quickly control temperature and suppress thermal drift, suitable for continuous production.

Common faults and maintenance

Vulnerable issues: Ceramic surface scaling, scratches, micro cracks; heating circuit resistance abnormality, short circuit; thermocouple temperature drift; water cooling interface leakage, sealing parts aging.

Maintenance suggestions: Regularly clean the process residues on the surface; perform temperature calibration annually; ｒｅｐｌａｃｅ the entire unit when there is ceramic damage, heating failure, or leakage.