AMAT 0010-23715 PMAX Emissometer (emissivity / temperature measurement probe)

To clarify: 0010-23715 and 0010-23716 are part of the same series, with identical appearance but different electrical / calibration versions of the PMAX high-temperature infrared temperature measurement / emissivity probe (Emissometer/Pyrometer Probe), used for the AMAT Centura PMAX heat treatment platform (RTP / annealing / oxidation). 

I. Basic Information

Model: 0010-23715 (often paired/interchangeable with 0010-23716, requires system calibration)

Full Name: PMAX Emissometer / Pyrometer Probe Assembly (Emissivity / High Temperature Thermometer Probe Assembly)

Manufacturer: Applied Materials (AMAT)

Compatible Platforms: Centura PMAX (200mm RTP, Rapid Annealing, Oxidation / Nitriding Process Chambers)

Core Purpose: Non-contact infrared temperature measurement + real-time emission rate measurement, closed-loop control of wafer temperature (500–1200°C), ensuring uniformity of annealing / oxidation

Key Parameters

Measurement Principle: Infrared Radiation (Monochromatic / Dichromatic) + Real-time Compensation of Emissivity (ε)

Temperature Range: 500°C – 1200°C (compatible with PMAX RTP)

Accuracy: ±1% FS (after calibration), Response Time < 100ms

Material: High-temperature resistant ceramic probe + Stainless Steel housing + Metal bellows seal (compatible with vacuum)

Signal Interface: Special Fiber Optic + Cable, connected to PMAX System Control Unit

Weight: Approximately 1.3–1.5kg

Environment: High Vacuum (1e-7 Torr), Plasma / Corrosive Gas Chamber Interior

Functions and Applications

Wafer Temperature Closed-loop Control: Real-time measurement of wafer surface temperature in RTP process, feedback adjustment of lamp array power, temperature control accuracy ±1°C.

Emissivity (ε) Measurement: Automatic compensation for emission rate differences of different films / silicon wafers, avoiding temperature drift, improving process repeatability.

Multi-zone Temperature Measurement: Single Chamber Multi-Probe Layout, monitoring temperature distribution at the center / edge of the wafer, ensuring internal uniformity.

Vacuum / High Temperature Compatibility: Sealed Structure Compatible with High Vacuum, Ceramic Probe Resistant to 1200°C Long-term Operation.

Differences from 0010-23716

0010-23715: Early Version, Different Emissivity Calibration Coefficient / Electrical Parameters, Compatible with Older PMAX Systems.

0010-23716: Upgraded Version, Optimized Accuracy / Stability, Compatible with New PMAX and System Software Updates.

Interchangeability: Physical Interface Consistent, but Requires Re-calibration + Matching System Firmware, Cannot Be Directly Interchanged.

Market and Maintenance

Status: Factory Discontinued, Market Mainly Includes Disassembly, Refurbishment, Surplus, Price $8,000–$14,000.

Weak Points: Probe Contamination / Scaling, Fiber Aging, Seal Leakage, Calibration Drift (Resulting in Inaccurate Temperature, Process Scrap).

Maintenance: Regular Wet Cleaning / Plasma Cleaning of Probe; Annual Calibration of Emissivity and Temperature; Replacement of Entire Set of Fibers for Aging Fiber.