AMAT 0100-02129

Brand: Applied Materials (AMAT)

Part Number: 0100-02129

Product Name: RF Cable Assembly / Radio Frequency Cable Assembly Product Description

AMAT 0100-02129 is a high-power RF coaxial cable assembly specifically designed for semiconductor etching and deposition equipment. As the key transmission link between the RF power source, the matcher, and the process chamber, it is responsible for stably delivering 13.56MHz RF power, ensuring the stability of plasma processing, and is a core consumable part of the equipment's RF circuit. 

Core parameters

Impedance: 50Ω (standard RF system impedance)

Operating frequency: 13.56MHz (standard frequency band for semiconductor plasma process)

Structure: Multi-layer shielded coaxial design, pre-installed AMAT dedicated RF connectors at both ends, sealed for anti-interference

Cable material: Low-loss coaxial core wire + double-layer shielding layer + wear-resistant and flame-retardant outer sheath

Connector type: Factory-customized high-reliability RF connector, anti-oxidation, resistant to plugging and unplugging

Performance indicators: Low VSWR (VSWR ≤ 1.1), low transmission loss, anti-electromagnetic interference

Compatible environment: Clean room (Class 100/1000), long-term continuous operation, temperature and humidity resistance Application scope

Compatible models

AMAT Centura series: DPS, DPS+ etching machines

AMAT 8300 etching equipment

Matching RF system: RF power supply, Micro-Match (such as 0010-00298), cavity electrodes

Process applications

Etching process: Conductive / dielectric etching for cavity RF power transmission

Deposition process: PECVD, ALD, etc. plasma deposition equipment RF circuits

Equipment location: RF power supply → matching unit → main connection line of cavity electrodes

Common accessories

Often used in combination with AMAT 0010-00298 (RF Micro-Match), 0100-00547/00757/00853, etc. to form a complete RF link.

Maintenance and fault indication

Common faults: Oxidation of connectors, damaged outer skin, poor contact of inner core, resulting in high RF reflected power, plasma flickering, and RF alarm of the equipment

Installation points: Avoid sharp corners bending, squeezing, and pulling; tighten the connector according to standard torque

Maintenance suggestions: Regular external inspection + standing wave / conduction test, ｒｅｐｌａｃｅ the faulty part as a whole, do not disassemble for maintenance