Brand: Applied Materials (AMAT)

Part Number: 0100-00689

General Information

Product Name: RF Coaxial Cable Assembly - Radio Frequency Coaxial Cable Assembly

Category: RF Power Transmission Accessories, Supporting Components for Cavity RF Circuits

Compatible Equipment

Compatible with AMAT 8300, Centura DPS/DPS+ Etching Machines. Often used in combination with 0010-00298 RF Matchers and 0100-00547 RF Cable Networking.

Specifications and Features

Electrical Parameters: Impedance 50Ω, Operating Frequency 13.56MHz, Low VSWR, Low Power Loss

Structure: Double-layer Shielded Coaxial Cable, Both Ends Integrated Special RF Connectors, Resistant to Flexing, Anti-Electromagnetic Interference

Operating Conditions: Compatible with Cleanroom Environment, Capable of Long-Term Carrying High-Power RF Signals, Compatible with Wiring Around Vacuum Chambers

Function: Responsible for RF Signal and Power Transfer Connection, Connecting RF Units, Matching Modules and Chamber Electrodes, Ensuring Stable Plasma Operation

Maintenance and Fault Points

Typical Faults: Oxidation of Joints, Damage to Cable Outer Skin, Internal Core Wire Breakage, which will trigger RF High Reflection, Abnormal Power, Plasma Arc Breakage Alarms

Installation Specifications: Strictly Prohibit Sharp Angle Bending, Heavy Pressure Pulling, Connectors Locked According to Standard Torque, Avoid Sealing and Contact Failure

Maintenance Method: Regular Inspection of Appearance and Conduction / VSWR, After Damage, ｒｅｐｌａｃｅ the Entire Set, No Disassembly for Maintenance

Compatibility & Market

Compatibility: Exclusive Customized Cable, Only Direct Replacement with the Same Part Number is Possible, Cannot Mix with Other Specifications of RF Cables

Supply: 

Original Factory New Delivery Lead Time is Long; Market has Tested Qualified Disassembled / Repaired Parts, Mostly Used for Production Line Maintenance and Emergency Replacement