Brand: Applied Materials (AMAT)

Part Number: 0100-00547 Basic Information

Product Name: RF Cable Assembly / RF Cable Assembly

Category: Specialized RF transmission cable assembly, key component for plasma chamber RF circuits

Compatible Models

Mainly compatible with AMAT 8300 and Centura DPS/DPS+ etching equipment, used in conjunction with the aforementioned 0010-00298 RF Micro-Match for signal/power transmission between RF power supply, matchers, and chamber electrodes.

Specifications and Features

Operating Frequency: 13.56 MHz, standard semiconductor RF frequency band

Impedance: 50Ω standard impedance, matching overall parameters of the RF system

Structure: Customized shielded coaxial cable, pre-installed dedicated RF connectors at both ends, overall sealed design

Performance: Low loss, low reflection, resistant to RF interference, capable of withstanding cleanroom conditions and long-term power-on operation

Usage: Transmits high-power RF signals, ensures stable power delivery to the chamber, maintains normal plasma operation

Maintenance and Fault Diagnosis

Common Issues: Loose connectors, aging shielding layer, cable damage, internal breakage, which may cause excessive reflected power, RF alarms, plasma flickering / extinction

Installation Requirements: Avoid excessive bending and squeezing of the wiring, tighten connectors according to standard torque, strictly prohibit violent plugging and unplugging

Maintenance: Regularly check oxidation of connectors, appearance damage, ｒｅｐｌａｃｅ the entire assembly after a fault, do not recommend replacing the cable or connectors alone