Brand: Applied Materials (AMAT - Applied Materials)

Part Number: 0100-09001

Product Name: RF Cable Assembly - Radio Frequency Cable Assembly Product Description

Integrated RF coaxial cable specifically for semiconductor plasma equipment, featuring original factory-specific connectors, is designed for transmitting high-power RF signals in RF systems. The cable has excellent shielding performance and low transmission loss, and can operate stably for a long time in cleanroom conditions, ensuring a stable plasma state in the chamber. It is a standard component for RF links in etching equipment. Core parameters

Standard impedance: 50Ω

Operating frequency: 13.56 MHz

Structure: Multi-layer shielded coaxial structure, integrated connector, reliable sealing

Electrical characteristics: Low VSWR, low signal loss, anti-electromagnetic interference

Physical characteristics: Outer sheath is wear-resistant and resistant to bending, connector is treated for anti-oxidation, suitable for internal wiring of equipment Application scope

Compatible models

AMAT Centura DPS/DPS+, 8300 series etching machines Usage scenario

Connect the RF power supply, RF micro-matcher, and cavity electrodes to form a complete RF transmission circuit.

It is applied in the wafer plasma etching process and is responsible for the high-power RF power transmission.

It can be used in conjunction with the RF matchers of the same series such as 0010-00298.