Brand: Applied Materials (AMAT - Applied Materials)

Part Number: 0100-03499

Product Name: RF Cable Assembly - Radio Frequency Cable Assembly Product Description

A high-power RF coaxial cable assembly specifically designed for semiconductor plasma processing equipment, integrating factory-customized connectors. As the transmission link of the RF system, it is responsible for the stable transmission of RF power and signals. It effectively reduces signal loss and electromagnetic interference, ensuring the continuous and stable operation of the plasma in the cavity. It is a standard accessory for RF circuits. Core parameters

Nominal impedance: 50Ω

Operating frequency: 13.56 MHz

Structure: Double-layer shielded coaxial cable, integrated crimped RF connector

Electrical performance: Low VSWR, low transmission loss, anti-radiation interference

Environmental adaptation: Cleanroom environment, resistant to long-term power supply, suitable for regular temperature and humidity conditions

Characteristics: Outer skin is wear-resistant and bend-resistant, connector is anti-oxidation-proof and has excellent sealing performance

Application scope

Compatible models

AMAT Centura DPS/DPS+, 8300 series etching machines, compatible with plasma processing equipment of the same platform. Usage scenario

Used for power connection between RF power supplies, RF matchers, and cavity electrodes, forming a complete RF transmission circuit.

Suitable for process stations such as wafer etching and plasma treatment.

Can be used in conjunction with RF micro-matchers like AMAT 0010-00298.