Brand: Applied Materials (AMAT)

Part Number: 0090-03581 INTERLOCK PERSONALITY BOARD

Product Name: Insulator / Ceramic Isolator (Ceramic Insulation Component)

Category: Insulation Accessories for Semiconductor Equipment Plasma Chambers, belonging to critical consumable parts in the manufacturing process

Applicable Models

Suitable for AMAT Centura series etching machines and reactive ion etching chambers, widely used for installing RF electrodes and bias components.

Specifications and Characteristics

Material: High-purity alumina ceramic, with excellent insulation performance, high temperature resistance, and resistance to plasma erosion

Operating Conditions: Works long-term in plasma, high voltage, and vacuum environments, able to withstand process chemical atmospheres

Function: Achieves electrical isolation between the electrode and the metal structure of the machine, isolating leakage, ensuring stable RF output, and avoiding discharge sparking

Maintenance and Usage Tips

Common Failures: Surface arc burn, cracks, porcelain detachment, carbon deposits / polymer adhesion. Any defect must be replaced immediately

Apply uniform force during installation, strictly avoid knocking or squeezing, to prevent ceramic from cracking

Cleaning can only be done by gently wiping with a dedicated dust-free solvent, and must not be polished or soaked in strong acids or strong alkalis

Replacement Requirements: Only direct interchange with the same material number is allowed. Ceramic size and insulation parameters are not interchangeable