Brand: AMAT（Applied Materials）

Part No.: 0100-09123

Type: Wafer Sensor PCB Assembly

Revision: Rev. C

FAB No.: 0110-09123

Basic Overview

The wafer sensor PCB specially designed for the AMAT Precision 5000 (P5000) CVD cluster equipment is used for wafer positioning detection, position positioning and edge sensing, ensuring the accuracy of wafer transmission and the connection with the process chamber. It is the core sensing component of the wafer processing system of the CVD equipment. Main Features

High-sensitivity sensing circuit: Compatible with infrared / photoelectric sensors, accurately identifying the presence, deviation and edge position of wafers

Compact industrial design: Suitable for installation in the limited space inside equipment, low power consumption, high stability

Integrated ESD protection: Compliant with SEMI standards, suitable for long-term continuous operation in clean rooms

Customized interface: Special plugs and pin definitions, connecting the equipment sensor and the main control unit, without universal alternatives Compatibility & Application

Adaptation equipment: 

Precision 5000 (P5000) series CVD cluster tool

Installation location: Wafer transfer chamber, Loadlock or peripheral sensing area of the process chamber

Core functions:

Detect whether the wafer is in place, prevent empty transfer or stacking

Monitor the wafer position deviation to ensure transfer accuracy

Feed back the wafer edge signal to assist positioning and calibration Supply Info

Status: New original (brand new, original packaging), Used/Refurbished (disassembled and refurbished, with test report)

Price range: USD 150–180 (second-hand), New price to be negotiated

Packaging: Standard ESD anti-static packaging

Warranty: Common 90-day warranty for refurbished items